ALT BİRİMLERİ

İçerik hazırlanmaktadır.

YÜRÜTÜCÜLER

İçerik hazırlanmaktadır.

ARAŞTIRMACILAR

İçerik hazırlanmaktadır.

The size of clean Room is 100 m2 and its classification is class 1000. The ambient of cleanroom is controlled so that R.H and temperature is 50% and 20 oC, respectively. The service and supporting units cover 150 m2, (please look at the image gallery for the pictures).

The clean-room has the wet/dry etch capability and PVD-based deposition system. There are also several equipments for characterization of microsystem.

There are also several simulation tools; the important ones are Comsol MEMS module and ANSYS programs.

The List of Equipments

  1. Mask aligner with UV and DUV (248 nm) light source
  2. ICP-DRIE
  3. PVD with e-beam, thermal evaporation and DC sputtering cabability
  4. Wet etching area: Spinner, hot plates and other relevant pieces
  5. Optical microscope with digital camera and fluoresan detection attachment
  6. Surface profilometer with 3-D image capture software
  7. Surface cleaner by plasma chamber
  8. Furnace with vacuum cabability
  9. Cell counting equipment
  10. Syringe system for microfludics
  11. SEM with EDX capability
İçerik hazırlanmaktadır.
Başlıca Çalışmalar ve Projeler

“Investigation on the Effects of Mechanical Forces on Endothel Cells Behaviour by Using Microfludics Systems in the domain of Mechanobiology” funded by TUBİTAK, Project no: 114R037, Manager, 2012 - 2014

“Advanced Filtration Technology to Remove Volatile Organic Compound”, funded by BOEING, Co-Manager, 2013 – 2016

“Characterization, Fabrication and Design of Microfluidics Systems Based on Dielectrophoresis for Cell Handling Applications”, funded by TUBİTAK, Project no: 111M730, Manager, 2012 - 2014

“Design, Fabrication and Characterization of Biosensor through Integration of Micro Channel System on Non-woven Textile Surfaces”, funded by TUBİTAK, Project no: 111M483, Researcher, 2012 - 2014

“Nano-boyutta şekilli ince filmlerin kök hücrelerin davranışları üzerine etkilerinin araştırılması” funded by ITU, Project No: 36173, Manager, 2011/13

“Membran Teknolojileri Ulusal Araştırma Merkezi Kurulması” funded by DPT, Researcher, 2010 -2013

Microscale Combustion of Liquid Hydrocarbons with Electrospray Techniquefunded by TUBİTAK, Project no: 109M449, Researcher, 2009 - 2012

“Biyolojik Hücre Ayrıştırma Uygulamaları için Düşük Maaliyetli Mikro-Akışkan Sistemlerin Tasarımı, Üretimi ve Karakterizasyonu” funded by TUBİTAK, Project no: 109M298, Manager, 2009 - 2011

 “Metallization of Cu and Au on polymer substrates by electroplating for flexible microelectronic applications”, funded by ITU, Researcher, 2008 - 2010

“Development of nano-patterned biofunctional surfaces by PVD and Surface MicroMachining”, funded by DPT, Project no: 2003K120630, Manager, 2005-2009

“Fabrication and Characterization of Nano-Sized Si and NiTi Shape Memory Alloys Sculptured Thin Films”, funded by TUBİTAK, Project no: 105M059, Researcher, 2005 - 2008

“Design and Analysis of MEMS Pressure Sensor based on Piezoresistive Sensing, funded by ITU, Project No: 31386, Manager, 2005

Designing and Analysing a high-g MEMS-based accelerometer with high precision measurement cabability and ready to fabricate with its electronic circuits”, funded by TUBITAK-Career, Project No: 104M275, Manager, 2005 - 2007

“The study on the materials and mechanical properties of plasma nitriding of 316L at low temperatures”, ITU Scientific Reserach Project, 2004 (completed), Manager  Project no: 30673

“Biyobenzetim Yolu ile NanoTeknolojik Fonksiyonel Malzeme Üretimi”, DPT Projesi, Araştırmacı, 2003 - 2006

Reliability of MOEMS: The mechanism of charging”, The Fraunhofer Institute, Dresden, manager as guest scientist, 2003

“The study of yield in IC fabrication line”, 2002-2003, TUBITAK-UAKAE, Manager

 “The investigation on deposition of sculptured thin films and realization of bed-springs in nanometer scale”, DPT (State Planning Organization), Project no: 101M133, 2001-2003, Manager
Ticarileşen, Ticarileşme Aşamasında olan veya Ticarileşme Potansiyeli olan Ürünler
İçerik hazırlanmaktadır.
Geliştirilen Başlıca Yöntemler, Prosedürler, Mekanizmalar, Ürünler, Yönetmelikler 
İçerik hazırlanmaktadır.

2014

“Design and Fabrication of a Wearable Microfibrious Nonwoven-Based Micro Fluidic Platform” to be published by Textile Research Center, DOI: 10.1177/0040517514528565, 2014

“Experimental Investigation of an Electrospray Injector”, M.C. Karakaya, R. Abdullahoglu, O. Tuncer, H. Kizil and L. Trabzon, pgs. 63-76, iss. 1, Vol. 34 Journal of Thermal Science and Technology (2014)

“Microfludic Nonwoven-based Device as a Potential Biosensor for Sweat Analysis”, C. Kanbaloglu, G. Baysal, S. Onder, F.N. Kok, I. Gocek, B.K. Kayaoglu, L. Trabzon and H. Kizil, Applied Mechanics and Materials Journal, pgs. 274, Vols. 490-491 (2014)

“Fabrication of Textile-based Platform for Rapid Analyte Detection”, S. Onder, F.N. Kok , L. Trabzon, H. Kizil, B.K. Kayaoglu and I. Gocek, , Applied Mechanics and Materials Journal pgs. 1611, Vols. 490-491 (2014)

“Fabrication Method of MEMS Based Clamped-Clamped Resonant Magnetometer”, O.T. Ghalehbeygi, L. Trabzon, L. Francis, H. Kizil, pgs 106 - 110, Vol. 170, Advanced Materials Research, (2014)

“Surface Plasma Characterization of Polyimide Films for Flexible Electronics”, H. Kizil, M.O. Pehlivaner and L. Trabzon, pgs 132 - 135, Vol. 170, Advanced Materials Research, (2014)

“Site investigation of damages occurred in a steel space truss roof structure due to ponding”,     Engineering Failure Analysis, Vol. 36, pgs. 301 (2014)

 

2013

“Bone response to biomimetic implants delivering BMP-2 and VEGF: An immunohistochemical study”, M. Ramazanoglu, R. Lutz, P. Rusche, L. Trabzon, G.T. Kose, C. Prenchl, K.A. Schlegel, Journal of Cranio-Maxillofacial Surgery, pgs: 826-35, Vol. 41(8) (2013)

2012

“Functional Nano and Micro-Scale Thin Film Deposition on Textiles: Emerging Technologies and Applications”, B. Karaguzel, Kayaoglu, I. Gocek, H. Kizil and L. Trabzon, Journal of Textile and Engineer, pg. 47, No: 18, Vol. 19 (2012)

“Demonstration of an Electrospray Injection System”, M.C. Karakaya, R. Abdullahoglu, O. Tuncer, H. Kizil and L. Trabzon, The Online Journal of Science and Technology (TOJSAT), p. 13, iss. 2, vol. 2, 2012

“The Effect of Channel Aspect Ratio on Particle Focussing in Microchannels”, H. Kizil, M. Yilmaz, L. Trabzon, Proceeding of International Conference and Exhibition on Biosensors & Electronics, 14-16 2012 Las Vegas, USA

“Synthesis and Characterization of ZnO Nanostructures on Biopolymer for Optoelectronics Applications”, B. Kilic, D. Onay, E. Kosa, L. Trabzon, H. Kizil, Journal of Materials Science and Engineering B 2 (12) 761-768 (2012) 

“Predicting the Extent of Hydrophilicity on Si Nano-Colum Surfaces”, M.F. Can, S. Guvendik, B. Benli, L. Trabzon, H. Kizil, M.S. Celik, Materiaswissenschaft und Werkstofftechnik, vol. 43 no:5 (2012)

“Nano- and Micro-Pattern Formation on Si-Wafer by Femtosecond Laser”,  S.D. Sofuoglu, L. Trabzon and H. Kizil,  Proceeding of International Conference on Surfaces, Coatings, and Nanostructured Materials (NANOSMAT-USA) 27-30 March 2012, Tampa, USA

“Dynamic Behaviour of a Novel Compliant MEMS Force Amplifier by Matlab/Simulink”, E. Kosa, L. Trabzon, U. Sonmez, Advanced Materials Research, pgs 1541-1547, Vol. 468-471  (2012)

“The Effect of Aysmmetry on Particle Focussing in Microchannels”, L. Trabzon, H. Kizil, L. Yobas, A. Ozbey, M. Yilmaz, M. Cengiz, M. Trabzon, M. Ordu and N. Kaygusuz, Advanced Materials

Research, pgs 482 – 485, Vol. 403-408  (2012)

 2011

“The Effects of Deep Reactive Etching (DRIE) Parameters on the Etch Rate of Si and SU-8”, M.R. Abdullahoglu, M.C. Karakaya, , O. Tuncer, H. Kizil, L. Trabzon,  Journal of Engineer and Machinery, pgs. 40-46, vol.52 2011

“Fabrication and Characterization of Si Nano-columns by Femtosecond Laser”, O.T. Ghalehbeygi, V. Kara, L. Trabzon, S. Akturk, H. Kizil, Journal of NanoResearch,  pgs. 15 – 20, Vol. 16 (2011)

The Effect of Si Nano-Columns in 2-D and 3-D on Cellular Behaviour: Nanotopography-Induced CaP Deposition from Differentiating Mesenchymal Stem Cells”. S. Guvendik, L. Trabzon, M. Ramazanoglu, Journal of NanoScience and NanoTechnology, pgs 8896 – 8902, Vol. 11 (2011)

“Demonstration of an Electrospray Injection System”, M.C. Karakaya, M.R. Abdullahoglu, O. Tuncer, H. Kizil, L. Trabzon, Proceeding of International Science and Technology Conference, p. 181, 7-9 December 2011, Istanbul-Turkey

“Geometry Induced Microparticle Seperation in Passive Contraction Expansion Straight Channels”, M Yilmaz, M. Cengiz, H. Kizil, A. Ozbey, L. Trabzon, Proceeding of 5th International Conference on Quantum, Nano and Micro Technologies, August, 21-27 2011, Nice-France, The best paper award is given to article

“Mesenchymal Stem Cell Differentiation by Nano-Engineered Si Columns”, L. Trabzon, M. Ramazanoglu, H. Kizil, S. Guvendik, 1st Middle East Conference on Biomedical Engineering, MECBME’11, January, 2011, UAE 

2010

“Engineering and Characterization of Si Nano-Columns by Oblique Angle Deposition”, L. Trabzon, S. Guvendik, H. Kizil, published in the 12th International Conference on Plasma Surface Engineering, p. 554, Garmish-Parternkirchen, September 13-17, 2010

“The Design and Analysis of Novel MEMS Force Amplifier”, E. Kosa, U. Sonmez, L. Trabzon, H. Kızıl, Turkish Journal of Engineering and Environmental Sciences, vol. 34, pgs. 253 - 259 (2010)

“Fabrication of Micro Channels with Angled Sidewall on Silicon bu Nd-YAG Laser Ablation”, A. Acemoglu, V. Ozkapıcı, V. Kara, O. Tayafeh, H. Kızıl and L. Trabzon, published in the Proceedings of 6th Nanoscience and Nanotechnology Conference, Izmir, 15 – 18 June 2010

“The Design and Analysis of Novel MEMS Force Amplifier”, E. Kosa, U. Sonmez, L. Trabzon, H. Kızıl, published in the Proceedings of 6th Nanoscience and Nanotechnology Conference, Izmir, 15 – 18 June 2010 

“Computational Analysis of Microparticle Seperation in Straight Channels”, H. Kizil, L. Trabzon, L. Yobaş, M. Yilmaz, A. Ozbey, Proceedings of Micromechanics Europe, p.273-276  (2010)

2009

“Engineering of Si-Nano Columns in 2-D and 3-D”, S. Guvendik, L. Trabzon, K. Kazmanli, M. Urgen, Book of Abstracts, NanoTech Insight, p. 76, Barcelona 2009

“Calcium Phosphate Incorporated Si Nano Columns”, S. Guvendik, D. Cayir, L. Trabzon, C. Ergun, K. Kazmanli, Abstract book of DSL2009 Rome, p. 155

“NiTi Memory Alloy Sculptured Thin Films by Glancing Angle Electron Beam Evaporation Technique”, K. Kazmanli, L. Trabzon, M. Urgen, G. Gurlik, p. 83, ICMCTF Abstract Book, 2009

“In-Plane and Out-of-Plane Engineering of Si Nano-Columns”, Sebahattin Guvendik, Levent Trabzon, Kursat Kazmanlı and Guliz Gurlik, published in the Proceedings of 5th International Advanced Technologies Symposium, Karabuk University, 13 – 15 May 2009

“Surface Effects on Reliability of Microsensors”, Esma Senel, Hüseyin Kızıl and Levent Trabzon,  published in the Proceedings of 5th International Advanced Technologies Symposium, Karabuk University, 13 – 15 May 2009 

2008

On the Surface Properties of Plasma Nitrided 316L Thin Film by Nano- and Micro-indentation, C. Igdil, M. Tosun and L. Trabzon, Proceedings of Plasma Surface Engineering Conference (PSE 2008), Garmisch-Partenkirchen

Mathematical Model and Analysis of Force Feedforward Mechanism for Surface MicroMachined Acceleroemeters, O. Erdener and L. Trabzon, Proceedings of  MicroMechanics Europe 08, pg. 189, Achen

 “Evaluation of Mechanical Properties and Biocompatibility of Plasma-nitrided Laser-cut 316L Cardiovascular Stents”, Trabzon L., Igdil M.C., Arslan E, Tamerler C., Bermek H., J. Materials Science: Materials in Medicine  Vol. 19, pgs. 2079 - 2086 (2008)

2007

In-Situ Characterization of Charging in the Silica Glass/Silicon Nitride Materials Exposed to DUV Laser Light, L. Trabzon, Proceedings of 10th ECerS pgs. 520 – 523 (ISBN: 3-87264-022-4)  (2007)

“The Fabrication and Characterization of nano-sized Porous Ag- Thin Film by Thermal Evaporation Method”, Y.A. Sener, L. Trabzon, K. Kazmanli, M. Urgen, Proceedings of 10th ECerS pgs. 1534 – 1539 (ISBN: 3-87264-022-4)  (2007)

“The Source of Instability of Micromirrors: the Behaviour of Insulator under DUV Laser Light”, H. Kizil, L. Trabzon, K. Lukat, I. Jankowski, P. Duerr and H. Schenk, Proceedings of  MicroMechanics Europe 07, pg. 207, Portugal

“Sculptured Nano-patterns for Bio-Technology”, L. Trabzon, K. Kazmanlı and M. Urgen, Proceedings of BioMed, Yeditepe University, August (2007) 

“The Corrosion Behaviour of Austenitic 316L Stainless Steel after Low-T Plasma Nitridation in the Physiological Solutions” E. Arslan, L. Trabzon, M.C. Igdil, K. Kazmanlı and T. Gulmez, the Plasma Processes and Polymers, Vol. 4, pgs: S717 – S720 (2007) 

“Afetlere ve Olağandışı Olaylara Müdahalede Enkaz Yönetimi” H. İskender, L. Trabzon and N. Erdoğan, TMMOB Afet Sempozyomu, p. 289, 2007

2006

L. Trabzon, invited, Fabrication Of Microchannels, invited, Journal of Engineer and Machinery, Vol. 47, No: 556, p. 34 (2006)

“Measurement of Charging Under DUV Laser by a Test Chip for MOEMS and the Mechanism of Charging”, L. Trabzon, K. Lukat, I. Jankowski, P. Duerr and H. Schenk Proceedings of the 6th euspen International Conference – Baden bei Wien - May (2006)

“The comparative study on mechanical properties of plasma nitrided 316L thin film by nano- and micro-indentation”, M.C. İğdil and L. Trabzon, 13th International Materials Symposium, Denizli  (2006) 

“On the materials properties of thin film plasma nitrided austenitic stainless steel”, L. Trabzon and C. İğdil,Vol. 200, iss. 14-15, p. 4195, Surface Science and Coating (2006)

2005

“Design and Analysis of Surface Micromachined Accelerometer With High Dynamic Range by Force Feedback Mechanism”, O. Erdener, L. Trabzon, A. Toker, MME05, 16th Workshop on Micromachining, Micromechanics, and Microsystems, p.160, 4-6, Göteburgh (2005)

“On the Design and Analysis of a Simple Smart Shirt for Monitoring Sudden Infant Death in Babies”, H.A. Yıldız, A. Önel, L. Trabzon, H.C. Karakaş, N. Uçar, International Scientific Conference “Intelligent Ambience and Well-Being”, Ambience’05, p. 1, 19-20, Tampere (2005)

“The Fabrication Principles of Nano-Sized Engineered Thin Films by Thermal Evaporation”, Y. A. Şener,L. Trabzon, K. Kazmanlı, M. Ürgen, 12th International Metallurgy-Materials Congress, Istanbul (2005)

“Mechanical Properties of Austenitic Stainless Steel after Low Temperature N2-H2 Plasma Nitridation”, L. Trabzon, C. İğdil, First International Conference on Diffusion in Solids and Liquids, Aveiro, Portugal (2005)

“Design Solutions in Electronic Textile”, H.C. Karakaş, N. Uçar, L. Trabzon, International Istanbul Textile Conferences, Recent Advances and Innovations in Textile and Clothing, p. 33., Istanbul (2005)

2004

“Electronic Textiles and wearable computers”, H.C. Karakaş, N. Uçar, L. Trabzon, II International Textile Engineering Conference, Brasil, September (2004) 

“Principles for Growth Pyhsics of Nano-Sized Sculptured Thin Films”, L. Trabzon and M.C. Igdil, Proceeding of 10th Materials Symposium, p.405 (2004)

 “Materials, Heat Treatments and Surface Treatments Used in the Stent Manufacturing”, E. Aslan, L. Trabzon and M.C. Igdil, Proceeding of 10th Materials Symposium, p.682 (2004)

“Properties and Application of Nanophase Materials”, C. Ergün, L. Trabzon, S. Yilmaz, T. Gulmez and B. Eryurek, Proceeding of 10th Materials Symposium, p.500 (2004)

2003

Changes in Material Properties of Low-k Interlayer Dielectric Polymers Induced by Exposure to Plasmas”, L. Trabzon and O. O. Awadelkarim, Vol. 65, p.463, Microelectronics Engineering (2003)

2002 

The Utilization and Effect of Plasma Exposure on Materials Properties of Low-k Polymers in Microelectronics", L. Trabzon and O. O. Awadelkarim, ASME International ESDA, ADM-015, p. 1

 (2002)

2001

“The Degradation of MOSFETs Induced by the Via Etching of Interlayer Low-k Polymers”
L. Trabzon and O. O. Awadelkarim, Proceeding of the 13th IEEE International Conference on Microelectronics, p.103, (2001)

“ Characterization of Gate Oxide Degradation Mechanisms in Trench-Gated Power MOSFETS Using the Charge Pumping Technique”, G. Dolny,  N. Gollagunta, S. Suliman, L. Trabzon, M. Horn, O.O. Awadelkarim, S. J. Fonash,  J. Hao, R. Ridley, T. Grebs, J .Zeng, C. Kocon,  International Symposium on Power Semiconductor Devices (ISPSD), p.431 (2001) 

- “The Dependence of UMOSFET’s Characteristics and Reliability on Geometry and Processing”S. A. Suliman, N. Gollagunta, L. Trabzon, J. Hao, R. S. Ridley, C. M. Knoedler, G. M. Dolny, O. O. Awadelkarim, and S. J. Fonash, Semicond. Science and Technology, Vol. 16, p. 447 (2001)

-“ The Impact of Trench Geometry and Processing on the Performance and Reliability of Low Voltage Power UMOSFETs” S. A. Suliman, N. Gallogunta , L. Trabzon, J. Hao, G. Dolny , R. Ridley , T. Greb , J. Benjamin , C. Kocon , J. Zeng , C. M. Knoedler, M. Horn, O. O. Awadelkarim, S. J. Fonash, and J. Ruzyllo, 39th Annual  Proceedings of the International Reliability Physics Symposium (IRPS), p. 308 (2001)

2000

- "Damage to Sub-Half Micron Metal-Oxide Field-Effect Transistors from Plasma Processing of Low-k Polymer Interlayer Dielectrics" L. Trabzon and O. O. Awadelkarim, Semiconductor Science and Technology, 15 (4), p. 309 (2000)

1999

- "The Dependence of Sub-Half-Micron Transistor’s Performance on Interlayer Dielectric Processing" L. Trabzon, O. O. Awadelkarim and J. Werking, J. Vac. Sci. Tech. B, 17 (5), p. 2216 (1999)               

" Material Property and Device Performance Measurements for The Assessment of Low-k Polymers as Interlayer Dielectric”, L. Trabzon, O. O. Awadelkarim and J. Werking, American Vacuum Society Proceedings of 1st International Conference On Advanced Materials and Processes for Microelectronics (ICAMPM) (1999)

The Dependence of Sub-Half-Micron Transistor’s Performance on Interlayer Dielectric Processing, L. Trabzon, O. O. Awadelkarim and J. Werking, American Vacuum Society Proceedings of 1st International Conference On Advanced Materials and Processes for Microelectronics (ICAMPM) (1999)

1998

- "The Effects of Interlayer Dielectric Deposition and Processing on the Reliability of N-Channel Transistors", L. Trabzon and O. O. Awadelkarim, Proceedings of the Symposium on Giga Scale Integration Technology, 35th Annual Society of Engineering Science Meeting, p. 95 (1998)

- "The impact of Interlayer Dielectric Deposition and Processing on N-Channel Transistor’s Fowler-Norheim Stress Reliability" L. Trabzon and O. O. Awadelkarim and J. Werking,, Solid State Electronics, 42 (11), p. 2031 (1998)

- "Damage to n-MOSFETs from Electrical Stress: Relationship to Processing Damage and Impact on Device Reliability", L. Trabzon and O. O. Awadelkarim, Microelectronics and Reliability, Vol. 38 (4), p. 651 (1998)

 1997

- "Electrical Stress Simulation of Plasma-Damage to Submicron Metal-Oxide-Silicon Field-Effect Transistors: Comparison between direct current and alternating current stresses", L. Trabzon and O. O. Awadelkarim, J. Vac. Sci. Technol. A Vol. 15 (3), p. 692 (1997)

- "Comparison Between Direct Current and Sinusoidal Stressing of Gate Oxide and Oxide/Silicon Interfaces in Metal-Oxide-Silicon Field-Effect Transistors", L.Trabzon and O. Awadelkarim, J. Werking, G. Berkusar and Y. Chan, J. Appl.Phys., Vol. 81 (3), p. 1575 (1997)

- "Sinusoidal AC Stressing of Thin-Gate Oxides and Oxide/Silicon Interfaces in 0.5 µm n-MOSFETs" L. Trabzon and O. O. Awadelkarim, J. Werking, G. Berkusar and Y.D. Chan, IEEE Electron Device Letters, Vol. 17 (12), p. 1 (1997)

İçerik hazırlanmaktadır.
Bilgi İşlem Daire Başkanlığı
© Copyright İTÜ